Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890862 | Processes for vacuum treating workpieces, and corresponding process equipment | Rudolf Wagner, Jerome Perrin | 2005-05-10 |
| 6869641 | Method and apparatus for ALD on a rotary susceptor | — | 2005-03-22 |