PS

Palani Sakthivel

AT Axcelis Technologies: 1 patents #14 of 47Top 30%
📍 Gaithersburg, MD: #38 of 127 inventorsTop 30%
🗺 Maryland: #462 of 2,094 inventorsTop 25%
Overall (2005): #125,118 of 245,428Top 55%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6951823 Plasma ashing process Carlo Waldfried, Orlando Escorcia, Qingyuan Han, Thomas Buckley 2005-10-04