DF

David Ferris

AT Axcelis Technologies: 1 patents #14 of 47Top 30%
📍 Rockville, MD: #45 of 150 inventorsTop 30%
🗺 Maryland: #462 of 2,094 inventorsTop 25%
Overall (2005): #217,728 of 245,428Top 90%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6897615 Plasma process and apparatus Alan C. Janos, Ivan L. Berry, III, Michael G. Ury 2005-05-24