Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954121 | Method for controlling piezoelectric coupling coefficient in film bulk acoustic resonators and apparatus embodying the method | Yury Oshmyansky, Benjamin M. YU, John D. Larson, III | 2005-10-11 |
| 6894360 | Electrostatic discharge protection of thin-film resonators | — | 2005-05-17 |
| 6874211 | Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method | John D. Larson, III, Richard C. Ruby | 2005-04-05 |