Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974094 | Anti-corrosion shower head used in dry etching process and method of manufacturing the same | Cheng-Lung Shih, Yung-Hsiang Hu, Ying-Chi Hsu | 2005-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974094 | Anti-corrosion shower head used in dry etching process and method of manufacturing the same | Cheng-Lung Shih, Yung-Hsiang Hu, Ying-Chi Hsu | 2005-12-13 |