Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933004 | Control of stress in metal films by controlling the temperature during film deposition | Martin Haueis | 2005-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933004 | Control of stress in metal films by controlling the temperature during film deposition | Martin Haueis | 2005-08-23 |