Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980339 | Deformable MEMS mirror | Dan Mark Marom | 2005-12-27 |
| 6924581 | Split spring providing multiple electrical leads for MEMS devices | — | 2005-08-02 |
| 6876484 | Deformable segmented MEMS mirror | — | 2005-04-05 |
| 6872947 | MEMS-based spectrophotometric system | — | 2005-03-29 |
| 6859300 | Monolithic two-axis MEMS device for optical switches | — | 2005-02-22 |
| 6850354 | Monolithic MEMS device for optical switches | — | 2005-02-01 |