Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927835 | Adaptive thermal control of lithographic chemical processes | Cassandra Owen, Stephan Ewald Sinkwitz | 2005-08-09 |
| 6873938 | Adaptive lithographic critical dimension enhancement | Theodore Paxton, Todd Hiar, Todd Davis | 2005-03-29 |