Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952258 | Wafer chuck with integrated reference sample | Thomas Traber | 2005-10-04 |
| 6952261 | System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size | — | 2005-10-04 |