Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6922230 | DUV scanner linewidth control by mask error factor compensation | Pradeep K. Govil | 2005-07-26 |
| 6888615 | System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position | Scott Coston | 2005-05-03 |