Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919270 | Method of manufacturing silicon carbide film | Kiyoshi Satoh | 2005-07-19 |
| 6849561 | Method of forming low-k films | — | 2005-02-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919270 | Method of manufacturing silicon carbide film | Kiyoshi Satoh | 2005-07-19 |
| 6849561 | Method of forming low-k films | — | 2005-02-01 |