Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921556 | Method of film deposition using single-wafer-processing type CVD | Akira Shimizu, Baiei Kawano, Kazuo Sato | 2005-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921556 | Method of film deposition using single-wafer-processing type CVD | Akira Shimizu, Baiei Kawano, Kazuo Sato | 2005-07-26 |