Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932867 | Method for growing thin oxide films | Mikko Ritala, Antti Rahtu, Markku Leskelä | 2005-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932867 | Method for growing thin oxide films | Mikko Ritala, Antti Rahtu, Markku Leskelä | 2005-08-23 |