Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964751 | Method and device for heat treating substrates | Arjen Storm, Ronald Bast, Vladimir Kuznetsov | 2005-11-15 |
| 6940047 | Heat treatment apparatus with temperature control system | Tom A. van Kesteren | 2005-09-06 |
| 6889149 | System and method for fingerprinting of semiconductor processing tools | Johan Siegers, Kornelius Haanstra | 2005-05-03 |
| 6876191 | Apparatus for treating wafers, provided with a sensor box | Christianus Gerardus Maria De Ridder, Gert-Jan Snijders, Albert Hasper | 2005-04-05 |