Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858546 | Method of depositing rare earth oxide thin films | Matti Putkonen, Mikko Ritala, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2005-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858546 | Method of depositing rare earth oxide thin films | Matti Putkonen, Mikko Ritala, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2005-02-22 |