Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942929 | Process chamber having component with yttrium-aluminum coating | Nianci Han, Hong Shih | 2005-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942929 | Process chamber having component with yttrium-aluminum coating | Nianci Han, Hong Shih | 2005-09-13 |