Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6837965 | Method and apparatus for etch processing with end point detection thereof | Aaron D. Gustafson, Daniel Baer, John P. Kettley, Jr. | 2005-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6837965 | Method and apparatus for etch processing with end point detection thereof | Aaron D. Gustafson, Daniel Baer, John P. Kettley, Jr. | 2005-01-04 |