Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943088 | Method of manufacturing a trench isolation structure for a semiconductor device with a different degree of corner rounding | Stephan Kruegel, Gert Burbach | 2005-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943088 | Method of manufacturing a trench isolation structure for a semiconductor device with a different degree of corner rounding | Stephan Kruegel, Gert Burbach | 2005-09-13 |