Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978438 | Optical proximity correction (OPC) technique using generalized figure of merit for photolithograhic processing | — | 2005-12-20 |
| 6974652 | Lithographic photomask and method of manufacture to improve photomask test measurement | Todd P. Lukanc, Bhanwar Singh, Christopher A. Spence | 2005-12-13 |