Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872668 | Multi-step tungsten etchback process to preserve barrier integrity in an integrated circuit structure | Wanqing Cao, Guo-Qiang Lo, Shih-Ked Lee | 2005-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872668 | Multi-step tungsten etchback process to preserve barrier integrity in an integrated circuit structure | Wanqing Cao, Guo-Qiang Lo, Shih-Ked Lee | 2005-03-29 |