Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918824 | Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device | Dave Marquardt, David Cohen, Edward J. McInerney | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918824 | Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device | Dave Marquardt, David Cohen, Edward J. McInerney | 2005-07-19 |