Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908838 | Method and device for treating semiconductor substrates | — | 2005-06-21 |
| 6849241 | Device and method for depositing one or more layers on a substrate | Martin Dauelsberg, Marcus Schumacher, Holger Juergensen, Gerd Strauch | 2005-02-01 |