Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6971832 | Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor | Andrew Lunday | 2005-12-06 |
| 6935828 | Wafer load lock and magnetically coupled linear delivery system | Andrew Lunday | 2005-08-30 |