Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897130 | Method for thermal processing semiconductor wafer with a flash discharge lamp after preheating to a predetermined temperature | Tatsushi Owada | 2005-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897130 | Method for thermal processing semiconductor wafer with a flash discharge lamp after preheating to a predetermined temperature | Tatsushi Owada | 2005-05-24 |