Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902646 | Sensor array for measuring plasma characteristics in plasma processing environments | Leonard Mahoney, Carl W. Almgren, Gregory A. Roche, William D. Sproul, Hendrik Walde | 2005-06-07 |