Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6870164 | Pulsed operation of hall-current ion sources | Boris Ciorneiu, Harold R. Kaufman | 2005-03-22 |
| 6843891 | Apparatus for sputter deposition | James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton | 2005-01-18 |