Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884338 | Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor | Susrut Kesari, William M. Lamanna, Michael J. Parent | 2005-04-26 |
| 6858124 | Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor | Michael J. Parent, William M. Lamanna, Susrut Kesari | 2005-02-22 |
| 6841079 | Fluorochemical treatment for silicon articles | Timothy D. Dunbar, Mark J. Pellerite, Larry D. Boardman, George Moore, Miguel A. Guerra +1 more | 2005-01-11 |