Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806991 | Fully released MEMs XYZ flexure stage with integrated capacitive feedback | Aaron A. Geisberger, Matthew D. Ellis | 2004-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806991 | Fully released MEMs XYZ flexure stage with integrated capacitive feedback | Aaron A. Geisberger, Matthew D. Ellis | 2004-10-19 |