Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806991 | Fully released MEMs XYZ flexure stage with integrated capacitive feedback | Neil Sarkar, Matthew D. Ellis | 2004-10-19 |
| 6718764 | System and method for microstructure positioning using metal yielding | Niladri Sarkar | 2004-04-13 |
| 6698201 | Cascaded bimorph rotary actuator | Niladri Sarkar | 2004-03-02 |