Issued Patents 2004
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836335 | Multi-axis interferometer | Andrew Eric Carlson, Peter De Groot | 2004-12-28 |
| 6819434 | Multi-axis interferometer | — | 2004-11-16 |
| 6806962 | Tilted interferometer | — | 2004-10-19 |
| 6806961 | Interferometric cyclic error compensation | — | 2004-10-19 |
| 6795197 | Interferometer system and litographic step-and-scan apparatus provided with such a system | — | 2004-09-21 |
| 6791693 | Multiple-pass interferometry | — | 2004-09-14 |
| 6778280 | Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components | Peter De Groot | 2004-08-17 |
| 6775009 | Differential interferometric scanning near-field confocal microscopy | — | 2004-08-10 |
| 6762845 | Multiple-pass interferometry | — | 2004-07-13 |
| 6757066 | Multiple degree of freedom interferometer | — | 2004-06-29 |
| 6753968 | Optical storage system based on scanning interferometric near-field confocal microscopy | — | 2004-06-22 |
| 6747744 | Interferometric servo control system for stage metrology | — | 2004-06-08 |
| 6727992 | Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements | — | 2004-04-27 |
| 6717736 | Catoptric and catadioptric imaging systems | — | 2004-04-06 |
| 6710884 | Apparatus and method for measuring mirrors in situ | — | 2004-03-23 |
| 6700665 | Interferometric apparatus for measuring the topography of mirrors in situ and providing error correction signals therefor | — | 2004-03-02 |