Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770407 | Methods for monitoring photoresists | Gilbert Feke, James F. Cameron, Gerhard Pohlers | 2004-08-03 |
| 6689529 | Method for measuring diffusion of photogenerated catalyst in chemically amplified resists | Gilbert Feke | 2004-02-10 |