Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811961 | Photoacid generator systems for short wavelength imaging | Gerhard Pohlers | 2004-11-02 |
| 6803169 | Photoresist compositions comprising blends of photoacid generators | James Michael Mori, George W. Orsula, James W. Thackeray | 2004-10-12 |
| 6783912 | Photoacid generators and photoresists comprising same | Gerhard Pohlers | 2004-08-31 |
| 6770407 | Methods for monitoring photoresists | Gilbert Feke, Robert D. Grober, Gerhard Pohlers | 2004-08-03 |
| 6767688 | Photoresist compositions | Gary Ganghui Teng, James W. Thackeray | 2004-07-27 |
| 6743563 | Photoresist compositions | Sheri L. Ablaza | 2004-06-01 |