Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827870 | Method and apparatus for etching and deposition using micro-plasmas | Yogesh B. Gianchandani | 2004-12-07 |
| 6686998 | Method and apparatus for glow discharges with liquid microelectrodes | Yogesh B. Gianchandani | 2004-02-03 |