Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827870 | Method and apparatus for etching and deposition using micro-plasmas | Chester G. Wilson | 2004-12-07 |
| 6692145 | Micromachined scanning thermal probe method and apparatus | Mo Li, Julius Wu | 2004-02-17 |
| 6686998 | Method and apparatus for glow discharges with liquid microelectrodes | Chester G. Wilson | 2004-02-03 |