Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791664 | Lithographic apparatus, device manufacturing method, and device manufacturing thereby | Frank Auer, Franciscus Andreas Cornelis Johannes Spanjers, Jan Holterman, Marinus P. Koster | 2004-09-14 |