Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791664 | Lithographic apparatus, device manufacturing method, and device manufacturing thereby | Franciscus Andreas Cornelis Johannes Spanjers, Jan Holterman, Marinus P. Koster, Theodorus Jacobus Adrianus de Vries | 2004-09-14 |
| 6788386 | Lithographic apparatus and device manufacturing method | Hendrikus Herman Marie Cox, Marc Wilhelmus Maria Van Der Wijst, Bastiaan Stephanus Hendricus Jansen, Dominicus Jacobus Petrus Adrianus Franken | 2004-09-07 |