Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Allan D. Weed | 2004-05-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Allan D. Weed | 2004-05-11 |