Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Roger B. Fish | 2004-05-11 |
| 6727509 | Wafer pedestal tilt mechanism | Michel Pharand | 2004-04-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Roger B. Fish | 2004-05-11 |
| 6727509 | Wafer pedestal tilt mechanism | Michel Pharand | 2004-04-27 |