Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791094 | Method and apparatus for determining beam parallelism and direction | Donna L. Smatlak, Paul A. Daniel | 2004-09-14 |
| 6777686 | Control system for indirectly heated cathode ion source | Daniel Distaso, Anthony Renau | 2004-08-17 |
| 6710359 | Methods and apparatus for scanned beam uniformity adjustment in ion implanters | Rosario Mollica | 2004-03-23 |