Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828204 | Method and system for compensating for anneal non-uniformities | — | 2004-12-07 |
| 6791097 | Adjustable conductance limiting aperture for ion implanters | Jay T. Scheuer, Eric D. Hermanson | 2004-09-14 |
| 6777686 | Control system for indirectly heated cathode ion source | Joseph C. Olson, Daniel Distaso | 2004-08-17 |