Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753964 | Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method | Kai Chen, Fumihiko Omura, Akihito Minamitsu | 2004-06-22 |
| 6700370 | Apparatus for measuring the thickness of a thin film having eddy current coil sensor | Kai Chen, Akihito Minamitsu | 2004-03-02 |