Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753964 | Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method | Kai Chen, Akihito Minamitsu, Shizuo Nakamura | 2004-06-22 |