YO

Yoshihito Ookawa

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #81,894 of 270,089Top 35%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6758941 Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unit Daisuke Hayashi 2004-07-06