Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D493873 | Heating gas supplier for semiconductor manufacturing equipment | — | 2004-08-03 |
| 6758941 | Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unit | Yoshihito Ookawa | 2004-07-06 |
| D490450 | Exhaust ring for semiconductor equipment | Toshiya Tsukahara | 2004-05-25 |