Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797111 | Plasma processing apparatus | Tetsu Osawa | 2004-09-28 |
| 6736930 | Microwave plasma processing apparatus for controlling a temperature of a wavelength reducing member | — | 2004-05-18 |
| 6675737 | Plasma processing apparatus | Tetsu Osawa, Masaki Hirayama, Tadahiro Ohmi | 2004-01-13 |