TO

Tetsu Osawa

TL Tokyo Electron Limited: 2 patents #53 of 414Top 15%
Overall (2004): #38,430 of 270,089Top 15%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6797111 Plasma processing apparatus Toshiaki Hongoh 2004-09-28
6675737 Plasma processing apparatus Toshiaki Hongoh, Masaki Hirayama, Tadahiro Ohmi 2004-01-13