Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821874 | Method for depositing tungsten silicide film and method for preparing gate electrode/wiring | Kenji Suzuki, Kazuya Okubo | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821874 | Method for depositing tungsten silicide film and method for preparing gate electrode/wiring | Kenji Suzuki, Kazuya Okubo | 2004-11-23 |