KO

Kazuya Okubo

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #181,030 of 270,089Top 70%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6821874 Method for depositing tungsten silicide film and method for preparing gate electrode/wiring Masahiko Matsudo, Kenji Suzuki 2004-11-23