Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755945 | Ionized PVD with sequential deposition and etching | Tugrul Yasar, Frank M. Cerio, Jr., Bruce Gittleman, Michael Grapperhaus, Rodney L. Robison | 2004-06-29 |
| 6719886 | Method and apparatus for ionized physical vapor deposition | John Drewery, Derrek Andrew Russell, Jozef Brcka, Mirko Vukovic, Michael Grapperhaus +2 more | 2004-04-13 |
| 6692219 | Reduced edge contact wafer handling system and method of retrofitting and using same | Stephen Dale Coomer, Stanislaw Kopacz, Michael J. Lombardi, Todd Michael Visconti | 2004-02-17 |