Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753962 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Craig E. Uhrich | 2004-06-22 |
| 6744850 | X-ray reflectance measurement system with adjustable resolution | Craig E. Uhrich, Louis N. Koppel | 2004-06-01 |
| 6707056 | Stage rotation system to improve edge measurements | Craig E. Uhrich | 2004-03-16 |